Nanosystem Fabrication Facility (NFF)

NFF(GZ) manufacturing process chain includes an 8-inch semiconductor research line with about 2000㎡ cleanroom, which supports researchers in applications ranging from MEMS and silicon optical devices to the 3rd generation semiconductor. It covers mask production, photolithography, dry and wet etching, thin film deposition, bonding, and metrology.

• Equipment training
• process consulting
• Technical guidance